Invention Grant
US08966985B2 Resonator including a passivation layer, a vibrating sensor including such a resonator, and a method of manufacture
有权
包括钝化层的谐振器，包括这种谐振器的振动传感器和制造方法
- Patent Title: Resonator including a passivation layer, a vibrating sensor including such a resonator, and a method of manufacture
- Patent Title (中): 包括钝化层的谐振器，包括这种谐振器的振动传感器和制造方法
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Application No.: US13504918Application Date: 2010-11-10
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Publication No.: US08966985B2Publication Date: 2015-03-03
- Inventor: Paul Vandebeuque
- Applicant: Paul Vandebeuque
- Applicant Address: FR Paris
- Assignee: Sagem Defense Securite
- Current Assignee: Sagem Defense Securite
- Current Assignee Address: FR Paris
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: FR0905426 20091112
- International Application: PCT/EP2010/006833 WO 20101110
- International Announcement: WO2011/057766 WO 20110519
- Main IPC: G01H11/00
- IPC: G01H11/00 ; G01C19/5691 ; G01C19/56
Abstract:
A resonator has a body of silicon-based material with at least one resonant part having at least one portion covered in an electrical conduction layer and at least one portion not covered in a conduction layer. The portion of the resonator not covered in a conduction layer is covered in a passivation layer in such a manner that, in the resonant part, the silicon-based material is completely covered by the conduction layer and by the passivation layer in combination. A vibrating sensor is also provided which includes such a resonator and a method of fabricating the resonator.
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