Invention Grant
- Patent Title: Ultra-miniature fiber-optic pressure sensor system and method of fabrication
- Patent Title (中): 超微型光纤压力传感器系统及其制造方法
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Application No.: US13440139Application Date: 2012-04-05
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Publication No.: US08966988B2Publication Date: 2015-03-03
- Inventor: Miao Yu , Hyungdae Bae , Xuming Zhang
- Applicant: Miao Yu , Hyungdae Bae , Xuming Zhang
- Applicant Address: US MD College Park
- Assignee: University of Maryland
- Current Assignee: University of Maryland
- Current Assignee Address: US MD College Park
- Agency: Rosenberg, Klein & Lee
- Main IPC: G01L7/00
- IPC: G01L7/00 ; G01L9/00 ; G02B6/26 ; G02B6/42 ; G02B26/00

Abstract:
Ultra-miniature surface-mountable optical pressure sensor is constructed on an optical fiber. The sensor design utilizes an angled fiber tip which steers the optical axis of the optic fiber by 90°. The optical cavity is formed on the sidewall of the optic fiber. The optical cavity may be covered with a polymer-metal composite diaphragm to operate as a pressure transducer, Alternatively, a polymer-filled cavity may be constructed which does not need a reflective diaphragm. The sensor exhibits a sufficient linearity over the broad pressure range with a high sensitivity. The sensitivity of the sensor may he tuned by controlling the thickness of the diaphragm. Methods of batch production of uniform device-to-device optical pressure sensors of co-axial and cross-axial configurations are presented.
Public/Granted literature
- US20120210797A1 ULTRA-MINIATURE FIBER-OPTIC PRESSURE SENSOR SYSTEM AND METHOD OF FABRICATION Public/Granted day:2012-08-23
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