Invention Grant
- Patent Title: Thermal compression bonding of semiconductor chips
- Patent Title (中): 半导体芯片的热压接
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Application No.: US13448866Application Date: 2012-04-17
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Publication No.: US08967452B2Publication Date: 2015-03-03
- Inventor: Yiu Ming Cheung , Tsan Yin Peter Lo , Ming Li , Yick Hong Mak , Ka San Lam
- Applicant: Yiu Ming Cheung , Tsan Yin Peter Lo , Ming Li , Yick Hong Mak , Ka San Lam
- Applicant Address: SG Singapore
- Assignee: ASM Technology Singapore Pte Ltd
- Current Assignee: ASM Technology Singapore Pte Ltd
- Current Assignee Address: SG Singapore
- Agency: Ostrolenk Faber LLP
- Main IPC: B23K31/02
- IPC: B23K31/02 ; B23K26/20

Abstract:
A die is prepared for thermal compression bonding by first aligning electrical contacts on the die to bond pads on a substrate onto which the die is to be mounted. Those electrical contacts are held against the bond pads on the substrate with a bonding tool. Partially bonding the die onto the substrate by providing heat to a portion of the die to elevate a temperature there to above a melting point of solder in the electrical contacts so as to melt at least some of the solder. Then thermally compress the whole die and heat it to above the melting point of the solder of the electrical contacts so that the solder of the electrical contacts outside the portion of the die are also melted to bond the die to the substrate.
Public/Granted literature
- US20130270230A1 THERMAL COMPRESSION BONDING OF SEMICONDUCTOR CHIPS Public/Granted day:2013-10-17
Information query
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