Invention Grant
- Patent Title: Carrier assembly apparatus
- Patent Title (中): 承载装置
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Application No.: US12966201Application Date: 2010-12-13
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Publication No.: US08967605B2Publication Date: 2015-03-03
- Inventor: Yoshinari Kogure
- Applicant: Yoshinari Kogure
- Applicant Address: JP Tokyo
- Assignee: Advantest Corporation
- Current Assignee: Advantest Corporation
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2009-288192 20091218
- Main IPC: B23Q1/25
- IPC: B23Q1/25 ; B23Q1/64 ; G01R1/067 ; G01R31/00 ; H05K3/30 ; G01R1/04

Abstract:
[Problem] A carrier assembly apparatus which is able to be streamlined in structure is provided.[Solution] The carrier assembly apparatus 1 comprises: an assembly table 31 which supports a base member 70 on which a die 90 is placed, a holding head 46 which holds a cover member 80, a pressure reduction head 44 which has a pressure reduction chamber 443 accommodating the cover member 80 and having an opening part 444 and which abuts against the assembly table 31 so as to form a sealed space, a first elevating actuator 43 which simultaneously move the holding head 46 and the pressure reduction head 44 to the assembly table 31, and a second elevating actuator 47 which moves the holding head 46 relative to the pressure reduction head 44.
Public/Granted literature
- US20110148020A1 CARRIER ASSEMBLY APPARATUS Public/Granted day:2011-06-23
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