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US08967817B2 Imaging optical system with at most 11.6% of the illuminated surfaces of the pupil plane being obscured 有权
具有至少11.6%的瞳孔平面的照射表面的成像光学系统被遮蔽

Imaging optical system with at most 11.6% of the illuminated surfaces of the pupil plane being obscured
Abstract:
The disclosure generally relates to imaging optical systems that include a plurality of mirrors, which image an object field lying in an object plane in an image field lying in an image plane, where at least one of the mirrors has a through-hole for imaging light to pass through. The disclosure also generally relates to projection exposure installations that include such imaging optical systems, methods of using such projection exposure installations, and components made by such methods.
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