Invention Grant
- Patent Title: Method of controlling single crystal diameter
- Patent Title (中): 控制单晶直径的方法
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Application No.: US12732492Application Date: 2010-03-26
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Publication No.: US08968468B2Publication Date: 2015-03-03
- Inventor: Ken Hamada
- Applicant: Ken Hamada
- Applicant Address: JP Tokyo
- Assignee: Sumco Corporation
- Current Assignee: Sumco Corporation
- Current Assignee Address: JP Tokyo
- Agency: Clark & Brody
- Priority: JP2009-079304 20090327
- Main IPC: C30B15/20
- IPC: C30B15/20 ; C30B15/26 ; C30B15/28

Abstract:
When pulling and growing a single crystal from a raw material melt by the Czochralski method, a boundary between the single crystal and the raw material melt is imaged by an optical sensor, and also the weight of the single crystal is measured by a weight sensor, a diameter value of the single crystal is calculated on the basis of first measured values of the diameter of the single crystal derived from image data captured by the optical sensor and second measured values of the diameter of the single crystal derived from weight data captured by the weight sensor, and a pulling rate of the single crystal and the temperature of the raw material melt are adjusted on the basis of the calculated diameter value to thereby control the diameter of the single crystal, and thus it is possible to accurately measure the diameter of a growing single crystal.
Public/Granted literature
- US20100263585A1 METHOD OF CONTROLLING SINGLE CRYSTAL DIAMETER Public/Granted day:2010-10-21
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