Invention Grant
- Patent Title: Stackable multi-port gas nozzles
- Patent Title (中): 可堆叠多口气体喷嘴
-
Application No.: US12880941Application Date: 2010-09-13
-
Publication No.: US08968473B2Publication Date: 2015-03-03
- Inventor: Steve Poppe , Yan Rozenzon , Peijun Ding
- Applicant: Steve Poppe , Yan Rozenzon , Peijun Ding
- Applicant Address: US CA Fremont
- Assignee: Silevo, Inc.
- Current Assignee: Silevo, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Park, Vaughan, Fleming & Dowler LLP
- Agent Shun Yao
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/458 ; C23C16/44

Abstract:
One embodiment provides a reactor for material deposition. The reactor includes a chamber and at least one gas nozzle. The chamber includes a pair of susceptors, each having a front side and a back side. The front side mounts a number of substrates. The susceptors are positioned vertically so that the front sides of the susceptors face each other, and the vertical edges of the susceptors are in contact with each other, thereby forming a substantially enclosed narrow channel between the substrates mounted on different susceptors. The gas nozzle includes a gas-inlet component situated in the center and a detachable gas-outlet component stacked around the gas-inlet component. The gas-inlet component includes at least one opening coupled to the chamber, and is configured to inject precursor gases into the chamber. The detachable gas-outlet component includes at least one opening coupled to the chamber, and is configured to output exhaust gases from the chamber.
Public/Granted literature
- US20110067632A1 STACKABLE MULTI-PORT GAS NOZZLES Public/Granted day:2011-03-24
Information query
IPC分类: