Invention Grant
- Patent Title: Wafer container cleaning device
- Patent Title (中): 晶圆容器清洗装置
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Application No.: US13012571Application Date: 2011-01-24
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Publication No.: US08968487B2Publication Date: 2015-03-03
- Inventor: In Ho Bang , Bum Sun Park , Bong Jin Choi
- Applicant: In Ho Bang , Bum Sun Park , Bong Jin Choi
- Applicant Address: KR
- Assignee: Deviceeng Co., Ltd.
- Current Assignee: Deviceeng Co., Ltd.
- Current Assignee Address: KR
- Agency: Patent Law Group LLP
- Priority: KR10-2010-46470 20100518
- Main IPC: B08B3/02
- IPC: B08B3/02 ; B08B9/00 ; H01L21/67 ; H01L21/673

Abstract:
A wafer container cleaning device for cleaning container bodies and container covers of wafer containers includes a housing having a cleaning chamber defined therein, a rotor rotatably installed within the cleaning chamber of the housing, a plurality of container holders mounted to the rotor to removably hold the container bodies and the container covers, and a cleaning solution sprayer nozzle for spraying a cleaning solution toward the container bodies and the container covers held by the container holders. Each of the container holders includes a support tray having a body support portion for supporting each of the container bodies in an upside down state and a cover support portion for supporting each of the container covers.
Public/Granted literature
- US20110284038A1 Wafer Container Cleaning Device Public/Granted day:2011-11-24
Information query
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