Invention Grant
- Patent Title: Electrostatic chucks and methods for refurbishing same
- Patent Title (中): 静电卡盘及其翻新方法
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Application No.: US14066369Application Date: 2013-10-29
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Publication No.: US08968503B2Publication Date: 2015-03-03
- Inventor: Alisa Hart , John C. Boyd , Liza Palma , Alasdair Dent
- Applicant: Novellus Systems, Inc.
- Applicant Address: US CA Fremont
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: B32B38/10
- IPC: B32B38/10 ; H01L21/683
Abstract:
Novel methods for extending electrostatic chuck lifetimes are provided. The methods involve providing a chuck having a metal cooling plate attached to a ceramic top plate, and after a period of use, disassembling the chuck, and providing a new chuck including the used metal cooling plate. In certain embodiments, the use of a low temperature bond material uniquely allows the described disassembly and reassembly without damage to other parts of the chuck.
Public/Granted literature
- US20140124123A1 ELECTROSTATIC CHUCKS AND METHODS FOR REFURBISHING SAME Public/Granted day:2014-05-08
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