Invention Grant
- Patent Title: Trihalosilane refining method
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Application No.: US14089409Application Date: 2013-11-25
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Publication No.: US08968521B2Publication Date: 2015-03-03
- Inventor: Sung Kyu Lee , Joon Ho Shin , Jong Ku Lee , Sung Kyun Kim
- Applicant: LG Chem, Ltd.
- Applicant Address: KR Seoul
- Assignee: LG Chem, Ltd.
- Current Assignee: LG Chem, Ltd.
- Current Assignee Address: KR Seoul
- Agency: McKenna Long & Aldridge, LLP
- Priority: KR10-2011-0117352 20111111
- Main IPC: B01D3/14
- IPC: B01D3/14 ; B01D3/42 ; C01B33/107
Abstract:
A trihalosilane refining device and a trihalosilane refining method are provided. The trihalosilane refining device can be useful in obtaining high-purity trihalosilane from a feed containing a trihalosilane while consuming a small amount of energy.
Public/Granted literature
- US20140076710A1 TRIHALOSILANE REFINING DEVICE Public/Granted day:2014-03-20
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