Invention Grant
- Patent Title: Electroplating processor with geometric electrolyte flow path
- Patent Title (中): 具有几何电解质流动路径的电镀处理器
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Application No.: US13468273Application Date: 2012-05-10
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Publication No.: US08968533B2Publication Date: 2015-03-03
- Inventor: Randy A. Harris , Daniel J. Woodruff , Jeffrey I. Turner , Gregory J. Wilson , Paul R. McHugh
- Applicant: Randy A. Harris , Daniel J. Woodruff , Jeffrey I. Turner , Gregory J. Wilson , Paul R. McHugh
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED Materials, Inc
- Current Assignee: APPLIED Materials, Inc
- Current Assignee Address: US CA Santa Clara
- Agency: Perkins Coie LLP
- Agent Kenneth H. Ohriner
- Main IPC: C25D17/12
- IPC: C25D17/12 ; C25D17/00 ; C25D7/12

Abstract:
An electroplating processor includes an electrode plate having a continuous flow path formed in a channel. The flow path may optionally be a coiled flow path. One or more electrodes are positioned in the channel. A membrane plate is attached to the electrode plate with a membrane in between them. Electrolyte moves through the flow path at a high velocity, preventing bubbles from sticking to the bottom surface of membrane. Any bubbles in the flow path are entrained in the fast moving electrolyte and carried away from the membrane. The electroplating processor may alternatively have a wire electrode extending through a tubular membrane formed into a coil or other shape, optionally including shapes having straight segments.
Public/Granted literature
- US20130299343A1 ELECTROPLATING PROCESSOR WITH GEOMETRIC ELECTROLYTE FLOW PATH Public/Granted day:2013-11-14
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