Invention Grant
US08968533B2 Electroplating processor with geometric electrolyte flow path 有权
具有几何电解质流动路径的电镀处理器

Electroplating processor with geometric electrolyte flow path
Abstract:
An electroplating processor includes an electrode plate having a continuous flow path formed in a channel. The flow path may optionally be a coiled flow path. One or more electrodes are positioned in the channel. A membrane plate is attached to the electrode plate with a membrane in between them. Electrolyte moves through the flow path at a high velocity, preventing bubbles from sticking to the bottom surface of membrane. Any bubbles in the flow path are entrained in the fast moving electrolyte and carried away from the membrane. The electroplating processor may alternatively have a wire electrode extending through a tubular membrane formed into a coil or other shape, optionally including shapes having straight segments.
Public/Granted literature
Information query
Patent Agency Ranking
0/0