Invention Grant
US08968980B2 Radiation-sensitive resin composition and compound 有权
辐射敏感性树脂组合物和化合物

Radiation-sensitive resin composition and compound
Abstract:
A radiation-sensitive resin composition includes an acid-dissociable group-containing resin, and a compound shown by the following general formula (1). wherein Z− represents a monovalent anion shown by a general formula (2), M+ represents a monovalent onium cation, R1 represents a linear or branched alkyl group having 1 to 12 carbon atoms substituted or unsubstantiated with a fluorine atom, or a linear or branched alkoxy group having 1 to 12 carbon atoms, and n is 1 or 2.
Public/Granted literature
Information query
Patent Agency Ranking
0/0