Invention Grant
- Patent Title: Coating compositions for use with an overcoated photoresist
- Patent Title (中): 用于外涂光致抗蚀剂的涂料组合物
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Application No.: US13341456Application Date: 2011-12-30
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Publication No.: US08968981B2Publication Date: 2015-03-03
- Inventor: Vipul Jain , Owendi Ongayi , Suzanne Coley , Anthony Zampini
- Applicant: Vipul Jain , Owendi Ongayi , Suzanne Coley , Anthony Zampini
- Agency: Mintz Levin Cohn Ferris Glovsky and Popeo, P.C
- Agent Peter F. Corless
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/11 ; G03F7/09

Abstract:
Organic coating compositions, particularly antireflective compositions, that comprise a component that comprises one or more parabanic acid moieties. Preferred compositions of the invention can reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and can serve as a planarizing, conformal or via-fill layer.
Public/Granted literature
- US20130004893A1 COATING COMPOSITIONS FOR USE WITH AN OVERCOATED PHOTORESIST Public/Granted day:2013-01-03
Information query
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