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US08968981B2 Coating compositions for use with an overcoated photoresist 有权
用于外涂光致抗蚀剂的涂料组合物

Coating compositions for use with an overcoated photoresist
Abstract:
Organic coating compositions, particularly antireflective compositions, that comprise a component that comprises one or more parabanic acid moieties. Preferred compositions of the invention can reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and can serve as a planarizing, conformal or via-fill layer.
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