Invention Grant
- Patent Title: Testing an electrical connection of a device cap
- Patent Title (中): 测试设备盖的电气连接
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Application No.: US13887233Application Date: 2013-05-03
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Publication No.: US08969102B2Publication Date: 2015-03-03
- Inventor: Peter S. Schultz
- Applicant: Peter S. Schultz
- Applicant Address: US TX Austin
- Assignee: Freescale Semiconductor, Inc.
- Current Assignee: Freescale Semiconductor, Inc.
- Current Assignee Address: US TX Austin
- Main IPC: H01L21/66
- IPC: H01L21/66 ; G01R31/26 ; G01R31/04
Abstract:
A method of testing a device includes setting a potential of a cap terminal of the device to a first voltage, setting a potential of a self test plate of the device to a testing voltage, and detecting a first displacement of a proof mass of the device when the cap terminal is set to the first voltage and the self test plate is set to the testing voltage. The method includes setting a potential of the cap terminal of the device to a second voltage, detecting a second displacement of the proof mass of the device when the cap terminal is set to the second voltage and the self test plate is set to the testing voltage, and comparing the first displacement and the second displacement to evaluate an electrical connection between the cap terminal and a cap of the device.
Public/Granted literature
- US20140329344A1 TESTING AN ELECTRICAL CONNECTION OF A DEVICE CAP Public/Granted day:2014-11-06
Information query
IPC分类:
