Invention Grant
- Patent Title: Forming a device having a curved piezoelectric membrane
- Patent Title (中): 形成具有弯曲压电膜的装置
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Application No.: US13810696Application Date: 2011-07-22
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Publication No.: US08969105B2Publication Date: 2015-03-03
- Inventor: Paul A. Hoisington , Jeffrey Birkmeyer , Andreas Bibl , Mats G. Ottosson , Gregory De Brabander , Zhenfang Chen , Mark Nepomnishy , Shinya Sugimoto
- Applicant: Paul A. Hoisington , Jeffrey Birkmeyer , Andreas Bibl , Mats G. Ottosson , Gregory De Brabander , Zhenfang Chen , Mark Nepomnishy , Shinya Sugimoto
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Fish & Richardson P.C.
- International Application: PCT/US2011/045057 WO 20110722
- International Announcement: WO2012/018561 WO 20120209
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L41/22 ; B41J2/14 ; B41J2/16 ; H01L41/09 ; H01L41/316 ; H01L41/33

Abstract:
Processes for forming an actuator having a curved piezoelectric membrane are disclosed. The processes utilize a profile-transferring substrate having a curved surface surrounded by a planar surface to form the curved piezoelectric membrane. The piezoelectric material used for the piezoelectric actuator is deposited on at least the curved surface of the profile-transferring substrate before the profile-transferring substrate is removed from the underside of the curved piezoelectric membrane. The resulting curved piezoelectric membrane includes grain structures that are columnar and aligned, and all or substantially all of the columnar grains are locally perpendicular to the curved surface of the piezoelectric membrane.
Public/Granted literature
- US20130210175A1 Forming a Device Having a Curved Piezoelectric Membrane Public/Granted day:2013-08-15
Information query
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