Invention Grant
- Patent Title: Method for manufacturing display device
- Patent Title (中): 显示装置制造方法
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Application No.: US14237560Application Date: 2012-09-20
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Publication No.: US08969111B2Publication Date: 2015-03-03
- Inventor: Tohru Sonoda , Shoji Okazaki , Hiromitsu Katsui , Tetsunori Tanaka
- Applicant: Sharp Kabushiki Kaisha
- Applicant Address: JP Osaka
- Assignee: Sharp Kabushiki Kaisha
- Current Assignee: Sharp Kabushiki Kaisha
- Current Assignee Address: JP Osaka
- Agency: Morrison & Foerster LLP
- Priority: JP2011-209648 20110926
- International Application: PCT/JP2012/074114 WO 20120920
- International Announcement: WO2013/047331 WO 20130404
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L33/40 ; H01L51/00 ; H05B33/28 ; H01L27/15 ; H01L33/42
Abstract:
An IZO layer (113) is formed on an a-ITO layer (112), and resist patterns (202R, 202G) having different film thicknesses are formed in at least sub-pixels (71R, 71G). The a-ITO layer (112) and the IZO layer (113) are etched by utilizing (i) a reduction in thickness of the resist patterns (202R, 202G) by ashing and (ii) a change in etching tolerance due to transformation from the a-ITO layer (112) into a p-ITO layer (114).
Public/Granted literature
- US20140206117A1 METHOD FOR MANUFACTURING DISPLAY DEVICE Public/Granted day:2014-07-24
Information query
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