Invention Grant
US08969152B2 Field-effect transistor (FET) with source-drain contact over gate spacer
有权
在栅极间隔物上具有源极 - 漏极接触的场效应晶体管(FET)
- Patent Title: Field-effect transistor (FET) with source-drain contact over gate spacer
- Patent Title (中): 在栅极间隔物上具有源极 - 漏极接触的场效应晶体管(FET)
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Application No.: US13920044Application Date: 2013-06-17
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Publication No.: US08969152B2Publication Date: 2015-03-03
- Inventor: Kevin K. Chan , Wilfried E. Haensch , Effendi Leobandung , Min Yang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Ido Tuchman; Louis J. Percello
- Main IPC: H01L21/8242
- IPC: H01L21/8242 ; H01L29/66

Abstract:
A field-effect transistor (FET) and methods for fabricating such. The FET includes a substrate having a crystalline orientation, a source region in the substrate, and a drain region in the substrate. Gate spacers are positioned over the source region and the drain region. The gate spacers include a gate spacer height. A source contact physically and electrically contacts the source region and extends beyond the gate spacer height. A drain contact physically and electrically contacts the drain region and extends beyond the gate spacer height. The source and drain contacts have the same crystalline orientation as the substrate.
Public/Granted literature
- US20140370681A1 FIELD-EFFECT TRANSISTOR (FET) WITH SOURCE-DRAIN CONTACT OVER GATE SPACER Public/Granted day:2014-12-18
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