Invention Grant
- Patent Title: Vertical gate LDMOS device
- Patent Title (中): 垂直门LDMOS器件
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Application No.: US14166659Application Date: 2014-01-28
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Publication No.: US08969158B2Publication Date: 2015-03-03
- Inventor: Marco A. Zuniga , Yang Lu , Badredin Fatemizadeh , Jayasimha Prasad , Amit Paul , Jun Ruan
- Applicant: Volterra Semiconductor Corporation
- Applicant Address: US CA San Jose
- Assignee: Volterra Semiconductor Corporation
- Current Assignee: Volterra Semiconductor Corporation
- Current Assignee Address: US CA San Jose
- Agency: Lathrop & Gage LLP
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/66 ; H01L29/78 ; H01L29/06 ; H01L21/8234 ; H01L27/088 ; H01L29/417 ; H01L29/423 ; H01L29/45 ; H01L29/49 ; H01L29/08 ; H01L29/10

Abstract:
A method of fabricating a vertical gate region in LDMOS transistor includes depositing a first masking layer on an n-well region implanted on a substrate, patterning the first masking layer to define an area, depositing a second masking layer over the area, etching through the second masking layer in a first portion of the area to expose the n-well region, and etching the exposed n-well region to form a first trench. The first trench, extending from a surface of the n-well region to a first depth, is filled with an oxide. The second masking layer is etched through in a second portion of the area to expose the n-well region. A second trench is formed in the n-well, the second trench extending from the surface to a second depth, less than the first depth. An asymmetric vertical gate is formed by filling the second trench with a conductive material.
Public/Granted literature
- US20140147979A1 Vertical Gate LDMOS Device Public/Granted day:2014-05-29
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