Invention Grant
- Patent Title: Fixed curvature force loading of mechanically spalled films
- Patent Title (中): 机械剥落膜的固定曲率力加载
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Application No.: US14168471Application Date: 2014-01-30
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Publication No.: US08969174B2Publication Date: 2015-03-03
- Inventor: Stephen W. Bedell , Keith E. Fogel , Paul A. Lauro , Xiao H. Liu , Devendra K. Sadana
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Louis J. Percello, Esq.
- Main IPC: H01L21/30
- IPC: H01L21/30 ; H01L31/18

Abstract:
A spalling method is provided that includes depositing a stressor layer on surface of a base substrate, and contacting the stressor layer with a planar transfer. The planar transfer surface is then traversed along a plane that is parallel to and having a vertical offset from the upper surface of the base substrate. The planar transfer surface is traversed in a direction from a first edge of the base substrate to an opposing second edge of the base substrate to cleave the base substrate and transfer a spalled portion of the base substrate to the planar transfer surface. The vertical offset between the plane along which the planar transfer surface is traversed and the upper surface of the base substrate is a fixed distance. The fixed distance of the vertical offset provides a uniform spalling force. A spalling method is also provided that includes a transfer roller.
Public/Granted literature
- US20140147988A1 FIXED CURVATURE FORCE LOADING OF MECHANICALLY SPALLED FILMS Public/Granted day:2014-05-29
Information query
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