Invention Grant
- Patent Title: Method for producing singulated semiconductor devices
- Patent Title (中): 制造单片半导体器件的方法
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Application No.: US13974991Application Date: 2013-08-23
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Publication No.: US08969175B2Publication Date: 2015-03-03
- Inventor: Andreas Ploessl , Heribert Zull
- Applicant: OSRAM Opto Semiconductors GmbH
- Applicant Address: DE Regensberg
- Assignee: OSRAM Opto Semiconductors GmbH
- Current Assignee: OSRAM Opto Semiconductors GmbH
- Current Assignee Address: DE Regensberg
- Agency: Slater & Matsil, L.L.P.
- Priority: DE102012215067 20120824
- Main IPC: H01L21/78
- IPC: H01L21/78 ; H01L21/304 ; H01L31/18 ; H01L21/66 ; H01L33/00 ; H01L33/20 ; H01L31/0687

Abstract:
A method for producing singulated semiconductor components includes providing a starting substrate. An etching process is carried out to form depressions at a side of the starting substrate. The depressions are arranged in the region of the semiconductor components to be produced. Walls present between the depressions are arranged in the region of separating regions provided for severing the starting substrate. The method furthermore comprises forming a metallic layer on the side of the starting substrate with the depressions and walls and carrying out a further etching process for severing the starting substrate in the separating regions and forming the singulated semiconductor components.
Public/Granted literature
- US20140113390A1 Method for Producing Singulated Semiconductor Devices Public/Granted day:2014-04-24
Information query
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