Invention Grant
- Patent Title: Manufacturing apparatus and manufacturing method for quantum dot material
- Patent Title (中): 量子点材料的制造装置和制造方法
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Application No.: US14233679Application Date: 2012-07-02
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Publication No.: US08969185B2Publication Date: 2015-03-03
- Inventor: Changsi Peng
- Applicant: Changsi Peng
- Applicant Address: CN Jiangsu
- Assignee: Soochow University
- Current Assignee: Soochow University
- Current Assignee Address: CN Jiangsu
- Agency: Swanson & Bratschun, L.L.C.
- Priority: CN201110224270 20110805
- International Application: PCT/CN2012/078013 WO 20120702
- International Announcement: WO2013/020423 WO 20130214
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L21/36 ; H01L33/00 ; H01L21/02 ; B82Y20/00 ; B82Y40/00 ; H01S5/34

Abstract:
A manufacturing apparatus and a manufacturing method for a quantum dot material. The manufacturing apparatus adds an optical device capable of generating an interference pattern in an existing epitaxial apparatus, so that a substrate applies an interference pattern on an epitaxial layer while performing epitaxial growth. By means of the interference pattern, a regularly distributed temperature field is formed on the epitaxial layer, so that on the epitaxial layer, an atom aggregation phenomenon is formed at dot positions with higher temperature, but no atoms are aggregated on areas having relatively lower temperature. Therefore, according to the temperature distribution on the surface of the epitaxial layer, positions where quantum dots generate can be controlled manually without introducing defects, thereby achieving a defect-free and long-range ordered quantum dot manufacturing.
Public/Granted literature
- US20140295653A1 Manufacturing Apparatus And Manufacturing Method For Quantum Dot Material Public/Granted day:2014-10-02
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