Invention Grant
US08969207B2 Methods of forming a masking layer for patterning underlying structures
有权
形成用于图案化底层结构的掩模层的方法
- Patent Title: Methods of forming a masking layer for patterning underlying structures
- Patent Title (中): 形成用于图案化底层结构的掩模层的方法
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Application No.: US13798690Application Date: 2013-03-13
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Publication No.: US08969207B2Publication Date: 2015-03-03
- Inventor: Gerard M. Schmid , Jeremy A. Wahl , Richard A. Farrell , Chanro Park
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/311
- IPC: H01L21/311 ; H01L23/48 ; H01L21/308

Abstract:
One illustrative method disclosed herein includes forming a patterned hard mask layer comprised of a plurality of discrete openings above a structure, wherein the patterned hard mask layer is comprised of a plurality of intersecting line-type features, forming a patterned etch mask above the patterned hard mask layer that exposes at least one, but not all, of the plurality of discrete openings, and performing at least one etching process through the patterned etch mask and the at least one exposed opening in the patterned hard mask layer to define an opening in the structure.
Public/Granted literature
- US20140273473A1 METHODS OF FORMING A MASKING LAYER FOR PATTERNING UNDERLYING STRUCTURES Public/Granted day:2014-09-18
Information query
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