Invention Grant
- Patent Title: Chalcogenide-based photovoltaic devices and methods of manufacturing the same
- Patent Title (中): 基于硫族化物的光伏器件及其制造方法
-
Application No.: US12641893Application Date: 2009-12-18
-
Publication No.: US08969719B2Publication Date: 2015-03-03
- Inventor: Mariana Rodica Munteanu , Erol Girt
- Applicant: Mariana Rodica Munteanu , Erol Girt
- Applicant Address: US DE Wilmington
- Assignee: Zetta Research and Development LLC—AQT Series
- Current Assignee: Zetta Research and Development LLC—AQT Series
- Current Assignee Address: US DE Wilmington
- Agency: Mattingly & Malur, PC
- Main IPC: H01L31/00
- IPC: H01L31/00 ; H01L31/032 ; C23C14/00 ; C23C14/06 ; C23C14/34 ; H01L31/0749

Abstract:
In one example embodiment, a method includes sputtering one or more absorber layers over a substrate. In a particular embodiment, the substrate is pre-heated to a substrate temperature of at least approximately 300 degrees Celsius prior to the sputtering and during the sputtering of each of one or more of the absorber layers, and the sputtering of at least one of the absorber layers is performed in a sputtering atmosphere having a pressure of at least 0.5 Pascals. Additionally, in a particular embodiment, the sputtering of at least one of the absorber layers comprises sputtering from a sputter target that comprises a chalcogenide alloy that comprises copper (Cu) and one or more of sulfur (S), selenium (Se), or tellurium (Te).
Public/Granted literature
- US20110011460A1 Chalcogenide-Based Photovoltaic Devices and Methods of Manufacturing the Same Public/Granted day:2011-01-20
Information query
IPC分类: