Invention Grant
- Patent Title: Carrier and adhesion amount measuring apparatus, and measuring method, program, and recording medium of the same
- Patent Title (中): 载体和附着量测量装置及其测量方法,程序和记录介质
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Application No.: US13679081Application Date: 2012-11-16
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Publication No.: US08969807B2Publication Date: 2015-03-03
- Inventor: Motoki Imamura , Shigeki Nishina
- Applicant: Motoki Imamura , Shigeki Nishina
- Applicant Address: JP Tokyo
- Assignee: Advantest Corporation
- Current Assignee: Advantest Corporation
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2009-247872 20091028
- Main IPC: G01J5/02
- IPC: G01J5/02 ; G01N21/17 ; G01N21/3581 ; G01N21/3504

Abstract:
A carrier includes attachment holes to which a catalyst attaches, and non-attachment holes to which the catalyst does not attach. An attachment quantity measurement device includes an electromagnetic wave output device that outputs a terahertz wave toward the carrier, an electromagnetic wave detector that detects the terahertz wave which has transmitted through the carrier, a reference value obtainer that obtains, based on a result detected by the electromagnetic wave detector, any one of an absorption rate, a group delay, and a dispersion of the terahertz wave in the non-attachment holes, and an attachment quantity obtainer that obtains, based on the result detected by the electromagnetic wave detector and the result obtained by the reference value obtainer, a weight or a density of the catalyst present in the attachment holes.
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