Invention Grant
US08969807B2 Carrier and adhesion amount measuring apparatus, and measuring method, program, and recording medium of the same 有权
载体和附着量测量装置及其测量方法,程序和记录介质

Carrier and adhesion amount measuring apparatus, and measuring method, program, and recording medium of the same
Abstract:
A carrier includes attachment holes to which a catalyst attaches, and non-attachment holes to which the catalyst does not attach. An attachment quantity measurement device includes an electromagnetic wave output device that outputs a terahertz wave toward the carrier, an electromagnetic wave detector that detects the terahertz wave which has transmitted through the carrier, a reference value obtainer that obtains, based on a result detected by the electromagnetic wave detector, any one of an absorption rate, a group delay, and a dispersion of the terahertz wave in the non-attachment holes, and an attachment quantity obtainer that obtains, based on the result detected by the electromagnetic wave detector and the result obtained by the reference value obtainer, a weight or a density of the catalyst present in the attachment holes.
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