Invention Grant
- Patent Title: Nonvolatile semiconductor memory device
- Patent Title (中): 非易失性半导体存储器件
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Application No.: US13848248Application Date: 2013-03-21
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Publication No.: US08969945B2Publication Date: 2015-03-03
- Inventor: Masaru Kito , Tomoo Hishida , Yoshiaki Fukuzumi
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L27/115

Abstract:
According to one embodiment, a nonvolatile semiconductor memory device, includes: a stacked body including a plurality of electrode layers stacked alternately with a plurality of insulating films; a plurality of first channel body layers; a memory film; a plurality of selection gates; a second channel body layer connecting to each of the plurality of first channel body layers; a gate insulating film; and a first interconnect electrically connected to at least one of the plurality of electrode layers. The stacked body has a through-hole communicating from the upper surface of the stacked body to the lower surface of the stacked body outside a cell region. And the first interconnect is drawn out through the through-hole from the upper surface side of the stacked body to the lower surface side of the stacked body.
Public/Granted literature
- US20140061766A1 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2014-03-06
Information query
IPC分类: