Invention Grant
- Patent Title: Vertical memory devices with quantum-dot charge storage cells
- Patent Title (中): 具有量子点电荷存储单元的垂直存储器件
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Application No.: US13042051Application Date: 2011-03-07
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Publication No.: US08969947B2Publication Date: 2015-03-03
- Inventor: Jae-goo Lee , Jung-dal Choi , Young-woo Park
- Applicant: Jae-goo Lee , Jung-dal Choi , Young-woo Park
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec, P.A.
- Priority: KR10-2010-0039167 20100427
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L21/28 ; H01L29/66 ; H01L29/423 ; H01L29/792 ; H01L27/115 ; B82Y10/00

Abstract:
A memory device includes a substrate, a semiconductor column extending perpendicularly from the substrate and a plurality of spaced-apart charge storage cells disposed along a sidewall of the semiconductor column. Each of the storage cells includes a tunneling insulating layer disposed on the sidewall of the semiconductor column, a polymer layer disposed on the tunneling insulating layer, a plurality of quantum dots disposed on or in the polymer layer and a blocking insulating layer disposed on the polymer layer.
Public/Granted literature
- US20110260237A1 VERTICAL MEMORY DEVICES WITH QUANTUM-DOT CHARGE STORAGE CELLS Public/Granted day:2011-10-27
Information query
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