Invention Grant
- Patent Title: Semiconductor device
- Patent Title (中): 半导体器件
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Application No.: US14453392Application Date: 2014-08-06
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Publication No.: US08969970B2Publication Date: 2015-03-03
- Inventor: Yoshihiro Sato , Takayuki Yamada
- Applicant: Panasonic Corporation
- Applicant Address: JP Osaka
- Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2009-191697 20090821
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L27/092 ; H01L21/02 ; H01L21/28 ; H01L21/3115 ; H01L21/8238 ; H01L29/49 ; H01L29/51 ; H01L29/66 ; H01L29/78

Abstract:
A semiconductor device includes a first MIS transistor and a second MIS transistor. The first MIS transistor includes a first gate insulating film which is formed on a first active region of a semiconductor substrate and has a first high dielectric constant film, and a first gate electrode formed on the first gate insulating film. The second MIS transistor includes a second gate insulating film which is formed on a second active region of the semiconductor substrate and has a second high dielectric constant film, and a second gate electrode formed on the second gate insulating film. The second high dielectric constant film contains first adjusting metal. The first high dielectric constant film has a higher nitrogen concentration than the second high dielectric constant film, and does not contain the first adjusting metal.
Public/Granted literature
- US20140346610A1 SEMICONDUCTOR DEVICE Public/Granted day:2014-11-27
Information query
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