Invention Grant
- Patent Title: Double-sided diaphragm micro gas-preconcentrator
- Patent Title (中): 双面隔膜微气预收敛器
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Application No.: US13570249Application Date: 2012-08-09
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Publication No.: US08969976B2Publication Date: 2015-03-03
- Inventor: Xiaosong Du , Ze Wu , Yi Li , Yadong Jiang , Dong Qiu
- Applicant: Xiaosong Du , Ze Wu , Yi Li , Yadong Jiang , Dong Qiu
- Applicant Address: CN Chengdu, Sichuan Province
- Assignee: University of Electronic Science and Technology of China
- Current Assignee: University of Electronic Science and Technology of China
- Current Assignee Address: CN Chengdu, Sichuan Province
- Priority: CN201210078853 20120323
- Main IPC: H01L27/02
- IPC: H01L27/02
Abstract:
A double-sided diaphragm micro gas-preconcentrator has a micro-gas chamber which is formed by bonding an upper silicon substrate with a lower silicon substrate. One or more suspended membranes are provided on every silicon substrate. The silicon where the suspended membrane is provided is completely removed for forming a cavity. A thin-film heater is deposited on every suspended membrane. A sorptive film is coated on an inner wall of every suspended membrane. Thus, the upper and lower sides of the preconcentrator in the present invention are suspended membranes, which improve the area of the sorptive film on the diaphragm. As a result, the preconcentrating factor is improved while keeping the small heat capacity, fast heating rate, and low power consumption features of the planar diaphragm preconcentrator.
Public/Granted literature
- US20130249022A1 Double-sided diaphragm micro gas-preconcentrator Public/Granted day:2013-09-26
Information query
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