Invention Grant
- Patent Title: Semiconductor storage device and manufacturing method thereof
- Patent Title (中): 半导体存储装置及其制造方法
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Application No.: US13425067Application Date: 2012-03-20
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Publication No.: US08969983B2Publication Date: 2015-03-03
- Inventor: Hiroyuki Kanaya
- Applicant: Hiroyuki Kanaya
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Knobbe, Martens, Olson & Bear LLP
- Priority: JP2011-152788 20110711
- Main IPC: H01L29/82
- IPC: H01L29/82 ; G11C11/00 ; H01L43/12 ; H01L43/08 ; H01L27/22 ; H01L21/00

Abstract:
A memory includes a semiconductor substrate. Cell transistors are on the substrate. Contact plugs each of which is buried between the adjacent cell transistors and electrically connected to a diffusion layer between the adjacent cell transistors. An interlayer dielectric film buries gaps between the contact plugs. A storage element is provided not above the contact plugs but above the interlayer dielectric film. A sidewall film covers a part of a side surface of the storage element, and is provided to overlap with one of the contact plugs as viewed from above a surface of the semiconductor substrate. A lower electrode is provided between a bottom of the storage element and the interlayer dielectric film and between the sidewall film and one of the contact plugs, and electrically connects the storage element to one of the contact plugs.
Public/Granted literature
- US20130015541A1 SEMICONDUCTOR STORAGE DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2013-01-17
Information query
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