Invention Grant
- Patent Title: Wide gap semiconductor device and method for manufacturing same
- Patent Title (中): 宽间隙半导体器件及其制造方法
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Application No.: US13950698Application Date: 2013-07-25
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Publication No.: US08969993B2Publication Date: 2015-03-03
- Inventor: Keiji Wada , Takeyoshi Masuda , Toru Hiyoshi
- Applicant: Sumitomo Electric Industries, Ltd.
- Applicant Address: JP Osaka-shi
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka-shi
- Agency: Venable LLP
- Agent Michael A. Sartori
- Priority: JP2012-195796 20120906
- Main IPC: H01L27/095
- IPC: H01L27/095 ; H01L29/47 ; H01L29/812 ; H01L31/07 ; H01L31/108 ; H01L29/872 ; H01L29/66 ; H01L29/06 ; H01L29/16 ; H01L29/20

Abstract:
A wide gap semiconductor device includes a substrate and a Schottky electrode. The substrate formed of a wide gap semiconductor material has a main face, and includes a first-conductivity-type region and a second-conductivity-type region. The Schottky electrode is arranged adjoining the main face of the substrate. At the substrate, there is foamed a trench having a side face continuous with the main face and a bottom continuous with the side face. The Schottky electrode adjoins the first-conductivity-type region at the side face of the trench and the main face, and adjoins the second-conductivity-type region at the bottom of the trench. The side face of the trench is inclined relative to the main face of the substrate.
Public/Granted literature
- US20140061671A1 WIDE GAP SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2014-03-06
Information query
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