According to one embodiment, there is disclosed a MEMS element. The MEMS element includes a lower electrode having a surface on which a plurality of minute convex portions are formed. A plurality of dielectric bumps are provided on the upper surface of the lower electrode and are thicker than heights of the convex portions. A dielectric layer is provided on the dielectric bumps and the lower electrode. An upper electrode is provided above the dielectric layer. The upper electrode is movable so as to vary capacitance between the upper electrode and the lower electrode.