Invention Grant
US08970095B2 Piezoelectric actuator including X-graded TiOX adhesive layer and its manufacturing method
有权
压电致动器包括X级二氧化钛粘合剂层及其制造方法
- Patent Title: Piezoelectric actuator including X-graded TiOX adhesive layer and its manufacturing method
- Patent Title (中): 压电致动器包括X级二氧化钛粘合剂层及其制造方法
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Application No.: US13399138Application Date: 2012-02-17
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Publication No.: US08970095B2Publication Date: 2015-03-03
- Inventor: Susumu Nakamura
- Applicant: Susumu Nakamura
- Applicant Address: JP Tokyo
- Assignee: Stanley Electric Co., Ltd.
- Current Assignee: Stanley Electric Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Holtz, Holtz, Goodman & Chick PC
- Priority: JP2011-036653 20110223
- Main IPC: H01L41/047
- IPC: H01L41/047 ; H01L41/22 ; H01L41/187
Abstract:
In a piezoelectric actuator including a substrate, an insulating layer formed on the substrate, an adhesive layer formed on the insulating layer, a Pt lower electrode layer formed on the adhesive layer, and a PZT piezoelectric layer formed on the Pt lower electrode layer, the adhesive layer is made of TiOx having a composition x which is graded so that the composition x on the side of thio insulating layer is larger than the composition x on the side of the Pt lower electrode layer.
Public/Granted literature
- US20120212108A1 PIEZOELECTRIC ACTUATOR INCLUDING X-GRADED TiOX ADHESIVE LAYER AND ITS MANUFACTURING METHOD Public/Granted day:2012-08-23
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