Invention Grant
US08970242B2 Method for manufacturing probe card, probe card, method for manufacturing semiconductor device, and method for forming probe
有权
用于制造探针卡,探针卡,制造半导体器件的方法以及形成探针的方法
- Patent Title: Method for manufacturing probe card, probe card, method for manufacturing semiconductor device, and method for forming probe
- Patent Title (中): 用于制造探针卡,探针卡,制造半导体器件的方法以及形成探针的方法
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Application No.: US12998228Application Date: 2009-09-29
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Publication No.: US08970242B2Publication Date: 2015-03-03
- Inventor: Goro Nakatani , Masahiro Sakuragi , Koichi Niino
- Applicant: Goro Nakatani , Masahiro Sakuragi , Koichi Niino
- Applicant Address: JP Kyoto
- Assignee: Rohm Co, Ltd.
- Current Assignee: Rohm Co, Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Rabin & Berdo, P.C.
- Priority: JP2008-253083 20080930; JP2008-253700 20080930
- International Application: PCT/JP2009/005002 WO 20090929
- International Announcement: WO2010/038433 WO 20100408
- Main IPC: H01K3/10
- IPC: H01K3/10 ; G01R1/073 ; H05K3/40 ; G01R3/00

Abstract:
Provided is a method for manufacturing a probe card which inspects electrical characteristics of a plurality of semiconductor devices in batch. The method includes: a step of forming a plurality of probes, which are to be brought into contact with external terminals of the semiconductor devices, on one side of a board which forms the base body of the probe card; a step of forming on the board, by photolithography and etching, a plurality of through-holes which reach the probes from the other side of the board; a step of forming, in the through-holes, through electrodes to be conductively connected with the probes, respectively; and a step of forming wiring, which is conductively connected with the through electrodes, on the other side of the board.
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