Invention Grant
US08970242B2 Method for manufacturing probe card, probe card, method for manufacturing semiconductor device, and method for forming probe 有权
用于制造探针卡,探针卡,制造半导体器件的方法以及形成探针的方法

Method for manufacturing probe card, probe card, method for manufacturing semiconductor device, and method for forming probe
Abstract:
Provided is a method for manufacturing a probe card which inspects electrical characteristics of a plurality of semiconductor devices in batch. The method includes: a step of forming a plurality of probes, which are to be brought into contact with external terminals of the semiconductor devices, on one side of a board which forms the base body of the probe card; a step of forming on the board, by photolithography and etching, a plurality of through-holes which reach the probes from the other side of the board; a step of forming, in the through-holes, through electrodes to be conductively connected with the probes, respectively; and a step of forming wiring, which is conductively connected with the through electrodes, on the other side of the board.
Information query
Patent Agency Ranking
0/0