Invention Grant
US08970830B2 Measuring method and device for determining transmission and/or reflection properties
有权
用于确定透射和/或反射特性的测量方法和装置
- Patent Title: Measuring method and device for determining transmission and/or reflection properties
- Patent Title (中): 用于确定透射和/或反射特性的测量方法和装置
-
Application No.: US13492306Application Date: 2012-06-08
-
Publication No.: US08970830B2Publication Date: 2015-03-03
- Inventor: Joerg Margraf , Peter Lamparter
- Applicant: Joerg Margraf , Peter Lamparter
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Patterson Thuente Pedersen, P.A.
- Priority: DE102011077290 20110609
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N21/89 ; G01N21/47 ; G01N21/896

Abstract:
The disclosure relates to optical measuring methods and apparatus for determining the transmission and/or reflection properties of translucent objects with utility for process monitoring and quality inspection in the manufacture of surface-coated substrates. According to the disclosure the transmission and reflection properties are determined in such a way that sequentially: a first large surface of the object is illuminated by a first illuminating device, with a photodetector measuring the total transmittance (Ttotal), a second, large surface of the object, lying opposite and parallel to the first one, is illuminated by a second illuminating device, with a photodetector measuring the diffuse transmittance (Tdiffuse), and optionally the first large surface of the object is illuminated by the first illuminating device, with the photodetector measuring the reflectance, and/or the second large surface of the object is illuminated by the second illuminating device, with the photodetector measuring the reflectance.
Public/Granted literature
- US20120314208A1 MEASURING METHOD AND DEVICE FOR DETERMINING TRANSMISSION AND/OR REFLECTION PROPERTIES Public/Granted day:2012-12-13
Information query