Invention Grant
US08971012B2 Variable-area capacitor structure, comb grid capacitor accelerometer and comb grid capacitor gyroscope
有权
可变面积电容器结构,梳状电容器加速度计和梳齿电容式陀螺仪
- Patent Title: Variable-area capacitor structure, comb grid capacitor accelerometer and comb grid capacitor gyroscope
- Patent Title (中): 可变面积电容器结构,梳状电容器加速度计和梳齿电容式陀螺仪
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Application No.: US13576042Application Date: 2010-06-23
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Publication No.: US08971012B2Publication Date: 2015-03-03
- Inventor: Zhonghe Jin , Shichang Hu , Xia Zhang , Huijie Zhu
- Applicant: Zhonghe Jin , Shichang Hu , Xia Zhang , Huijie Zhu
- Applicant Address: CN Hangzhou, Zhejiang Province
- Assignee: Zhejiang University
- Current Assignee: Zhejiang University
- Current Assignee Address: CN Hangzhou, Zhejiang Province
- Agency: Jacobson Holman PLLC
- Agent Jiwen Chen
- Priority: CN201010151630 20100420; CN201010151636 20100420; CN201010151653 20100420
- International Application: PCT/CN2010/074340 WO 20100623
- International Announcement: WO2011/130941 WO 20111027
- Main IPC: H01G5/04
- IPC: H01G5/04 ; G01C19/5755 ; G01P15/125 ; G01P15/08

Abstract:
The present invention relates to a variable-area capacitor for a micromechanical sensor, a micromechanical comb grid capacitor accelerometer and a micromechanical comb grid capacitor gyroscope. Among them, the variable-area capacitor structure comprises of a movable and a fixed electrodes in each capacitor unit; a front surface of aforesaid movable electrode is parallel to that of aforesaid fixed electrode; the front surface of aforesaid movable electrode is in a rectangular shape, and the front surface of the fixed electrode is in a triangular or sawteeth shape or the front surface of the movable electrode is in a triangular or sawteeth shape, and the front surface of the fixed electrode is in a rectangular form; the triangular front surface is only overlapped with one long side of aforesaid rectangular front surface. Micromechanical sensors with variable-area capacitor structures of the invention can adjust elasticity coefficient as compared with present technology.
Public/Granted literature
- US20120293907A1 VARIABLE-AREA CAPACITOR STRUCTURE, COMB GRID CAPACITOR ACCELEROMETER AND COMB GRID CAPACITOR GYROSCOPE Public/Granted day:2012-11-22
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