Invention Grant
- Patent Title: Spacer resin pattern helping to reduce optical coupling loss in optical waveguide for light-emitting element or light-receiving element on semiconductor
- Patent Title (中): 间隔树脂图案有助于减少半导体上的发光元件或光接收元件的光波导中的光耦合损耗
-
Application No.: US13863433Application Date: 2013-04-16
-
Publication No.: US08971678B2Publication Date: 2015-03-03
- Inventor: Daiju Nakano , Masao Tokunari , Kazushige Toriyama , Yutaka Tsukada
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Vazken Alexanian
- Priority: JP2012-093713 20120417
- Main IPC: G02B6/42
- IPC: G02B6/42 ; H01L33/58 ; H01L31/0232 ; G02B6/12 ; G02B6/26 ; H01L25/16

Abstract:
Spacer resin pattern layer which precisely aligns a light-emitting element or a light-receiving element relative to both a waveguide pattern layer and electrical circuit pattern layer from the semiconductor wafer level. A substratum of resin having a through-hole provided for electrical communication with an electrical circuit pattern layer is formed on a semiconductor wafer. A truncated cone-shaped three-dimensional reflective surface is formed to guide the emitted light towards or received light from a waveguide pattern layer. A metal film is deposited planarly in a predetermined range from the center when positioned relative to the position of the through-hole. A truncated cone-shaped mold is stamped in the center. By modifying the direction of the light using this tapered structure, the precision tolerance is increased and optical loss is reduced.
Public/Granted literature
Information query