Invention Grant
US08972911B2 Image processing device and computer program for performing image processing
有权
用于执行图像处理的图像处理装置和计算机程序
- Patent Title: Image processing device and computer program for performing image processing
- Patent Title (中): 用于执行图像处理的图像处理装置和计算机程序
-
Application No.: US14000212Application Date: 2012-02-27
-
Publication No.: US08972911B2Publication Date: 2015-03-03
- Inventor: Ryoichi Matsuoka , Hiroaki Mito
- Applicant: Ryoichi Matsuoka , Hiroaki Mito
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2011-041109 20110228
- International Application: PCT/JP2012/054726 WO 20120227
- International Announcement: WO2012/117997 WO 20120907
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G01B15/04 ; H01L21/66 ; G03F7/20

Abstract:
It is an object of the present invention to provide an image processing device for allowing an actual-image-closer pattern to be formed based on the design data, or its simulation image. In order to accomplish the above-described object, the proposal is made concerning an image processing device which includes an image processing unit which sets the operation condition of a charged-particle beam device on the basis of the design data on a semiconductor element. Here, the image processing device accesses a library for storing device-condition information on the charged-particle beam device, pattern types, and a plurality of combinations of pattern information on each pattern-region basis. Moreover, the image processing device forms a composite image of each pattern region, using the pattern information on each pattern-region basis, and based on the device-condition information and the selection of a pattern type from the pattern types.
Public/Granted literature
- US20130326439A1 IMAGE PROCESSING DEVICE AND COMPUTER PROGRAM FOR PERFORMING IMAGE PROCESSING Public/Granted day:2013-12-05
Information query