Invention Grant
- Patent Title: Photomask cleaning device
- Patent Title (中): 光掩模清洗装置
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Application No.: US13761236Application Date: 2013-02-07
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Publication No.: US08973199B2Publication Date: 2015-03-10
- Inventor: Yung-Chin Pan
- Applicant: Gudeng Precision Industrial Co, Ltd.
- Applicant Address: TW New Taipei
- Assignee: Gudeng Precision Industrial Co., Ltd.
- Current Assignee: Gudeng Precision Industrial Co., Ltd.
- Current Assignee Address: TW New Taipei
- Agency: Li & Cai Intellectual Property (USA) Office
- Priority: TW101222391U 20121119
- Main IPC: G03F1/82
- IPC: G03F1/82 ; B08B1/00 ; B08B3/02

Abstract:
A photomask cleaning device includes a stage, a fluid dispenser, a scrubbing unit, a cover and a fixing unit. The fluid dispenser includes a direct dispensing unit disposed correspondingly to the scrubbing unit, and an oblique dispensing unit obliquely spraying water onto a photomask. Majority of the particles can be removed with the combined application of the oblique dispensing unit and the scrubbing unit.
Public/Granted literature
- US20140137347A1 PHOTOMASK CLEANING DEVICE Public/Granted day:2014-05-22
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