Invention Grant
US08973440B2 Piezoelectric resonator element, piezoelectric resonator, piezoelectric oscillator, resonator gyro element, resonator gyro sensor, and electronic apparatus 有权
压电谐振元件,压电谐振器,压电振荡器,谐振陀螺元件,谐振陀螺传感器和电子设备

Piezoelectric resonator element, piezoelectric resonator, piezoelectric oscillator, resonator gyro element, resonator gyro sensor, and electronic apparatus
Abstract:
A piezoelectric substrate includes vibrating arms, a base portion to which one end portion of each vibrating arm is connected, spindle portions formed in the other end portion of each vibrating arm, formed to have a large width, and having first groove portions formed therein, and second groove portions that are formed along the resonator center line of each vibrating arm, and flexure-torsional combined resonator is excited. A piezoelectric resonator element has flexural resonator of flexure-torsional combined resonator that is excited as its principal resonator and sets the cutting angle of the piezoelectric substrate, the widths and the depths of the first groove portion and the second groove portion, and the thickness of the vibrating arm such that the frequency-temperature characteristics represent third-order characteristics with respect to the temperature.
Information query
Patent Agency Ranking
0/0