Invention Grant
- Patent Title: Imprint method and imprint apparatus
- Patent Title (中): 压印方法和压印装置
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Application No.: US13023225Application Date: 2011-02-08
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Publication No.: US08973494B2Publication Date: 2015-03-10
- Inventor: Masayuki Hatano , Ikuo Yoneda , Tetsuro Nakasugi , Kenji Ooki
- Applicant: Masayuki Hatano , Ikuo Yoneda , Tetsuro Nakasugi , Kenji Ooki
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2010-25239 20100208
- Main IPC: G03F7/00
- IPC: G03F7/00 ; B82Y10/00

Abstract:
According to one embodiment, an imprint method is disclosed. The method can include forming a liquid droplet of a transfer material with a volume greater than a predetermined reference volume by dropping the transfer material onto a major surface of a processing substrate. The method can include reducing the volume of the liquid droplet to be less than the reference volume by volatilizing the liquid droplet. In addition, the method can include filling the transfer material into a recess provided in a transfer surface of a template by bringing the liquid droplet having the volume reduced to be less than the reference volume into contact with the transfer surface of the template.
Public/Granted literature
- US20110192300A1 IMPRINT METHOD AND IMPRINT APPARATUS Public/Granted day:2011-08-11
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