Invention Grant
- Patent Title: Imprint apparatus, imprint method, and article manufacturing method
- Patent Title (中): 印刷装置,印记法和制品制造方法
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Application No.: US12536317Application Date: 2009-08-05
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Publication No.: US08973495B2Publication Date: 2015-03-10
- Inventor: Kazuyuki Kasumi , Hideki Ina
- Applicant: Kazuyuki Kasumi , Hideki Ina
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA Inc IP Division
- Priority: JP2008-203611 20080806
- Main IPC: G03F7/00
- IPC: G03F7/00 ; B82Y10/00 ; B82Y40/00

Abstract:
There is provided an imprint apparatus configured to perform an imprint in which a resin on a substrate is molded using a mold and a pattern is formed on the substrate. The apparatus includes a press unit configured to press the resin on the substrate and the mold to each other, a cure unit configured to irradiate light to the resin molded by the mold to cure the resin, and a movement unit configured to move the mold and the substrate, from a position at which the press is performed by the press unit to a position at which the light is irradiated by the cure unit, and from the position at which the light is irradiated by the cure unit to a position at which the mold is released.
Public/Granted literature
- US20100031833A1 IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD Public/Granted day:2010-02-11
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