Invention Grant
- Patent Title: Gas concentration controller system
-
Application No.: US13327678Application Date: 2011-12-15
-
Publication No.: US08973606B2Publication Date: 2015-03-10
- Inventor: Yuichiro Hashimoto , Junichi Miyaji
- Applicant: Yuichiro Hashimoto , Junichi Miyaji
- Applicant Address: JP Kyoto-shi
- Assignee: HORIBA STEC, Co., Ltd.
- Current Assignee: HORIBA STEC, Co., Ltd.
- Current Assignee Address: JP Kyoto-shi
- Agency: Alleman Hall McCoy Russell & Tuttle LLP
- Priority: JP2010-282092 20101217
- Main IPC: F17D3/00
- IPC: F17D3/00 ; G05D11/13 ; G01N33/00

Abstract:
The present invention is one that prevents standard gas from remaining in a standard gas line to prevent a concentration of standard gas from being reduced due to adsorption, modification, or the like, and has: a diluent gas line provided with a diluent gas flow rate controlling mechanism; a standard gas line provided with a standard gas flow rate controlling mechanism; an output gas line joined by the diluent gas line and standard gas line and outputs the standard gas having a predetermined concentration; an exhaust gas line connected to an upstream side of the standard gas flow rate controlling mechanism in the standard gas line and provided with an on/off valve and a flow rate control part; and a control part that, depending on a flow rate of the standard gas flowing through the standard gas line or the type of the standard gas, switches on/off the on/off valve.
Public/Granted literature
- US09116526B2 Gas concentration controller system Public/Granted day:2015-08-25
Information query