Invention Grant
- Patent Title: Automatic storage system
- Patent Title (中): 自动存储系统
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Application No.: US12801354Application Date: 2010-06-04
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Publication No.: US08974167B2Publication Date: 2015-03-10
- Inventor: Yasuhisa Ito
- Applicant: Yasuhisa Ito
- Applicant Address: JP Kyoto
- Assignee: Murata Machinery, Ltd.
- Current Assignee: Murata Machinery, Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Roylance, Abrams, Berdo & Goodman, LLP
- Priority: JP2009-142619 20090615
- Main IPC: H01L21/677
- IPC: H01L21/677

Abstract:
The front automatic storage system includes a plurality of shelves, a transferring apparatus, and a moveable frame. The shelves are arranged facing a semiconductor processing apparatus and at least one of the shelves is positioned above a transfer port of the semiconductor processing apparatus. The transferring apparatus is contrived to move among the shelves and transfer cassettes C between any shelf and the transfer port. The frame is contrived such that it can move the transferring apparatus and the at least one shelf positioned above the transfer port. The frame is also contrived such that it can move in a first horizontal direction toward and away from a first position where the at least one shelf is arranged above the transfer section.
Public/Granted literature
- US20100316471A1 Automatic storage system Public/Granted day:2010-12-16
Information query
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