Invention Grant
- Patent Title: Insert carrier and method for the simultaneous double-side material-removing processing of semiconductor wafers
- Patent Title (中): 用于半导体晶片的同时双面材料去除处理的插入载体和方法
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Application No.: US13311575Application Date: 2011-12-06
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Publication No.: US08974267B2Publication Date: 2015-03-10
- Inventor: Georg Pietsch , Michael Kerstan
- Applicant: Georg Pietsch , Michael Kerstan
- Applicant Address: DE Munich
- Assignee: Siltronic AG
- Current Assignee: Siltronic AG
- Current Assignee Address: DE Munich
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: DE102011003008 20110121
- Main IPC: B24B1/00
- IPC: B24B1/00 ; B24B37/28

Abstract:
An insert carrier is configured to receive at least one semiconductor wafer for double-side processing of the wafer between two working disks of a lapping, grinding or polishing process. The insert carrier includes a core of a first material that has a first surface and a second surface, and at least one opening configured to receive a semiconductor wafer. A coating at least partially covers the first and second surfaces of the core. The coating includes a surface remote from the core that includes a structuring including elevations and depressions. A correlation length of the elevations and depressions is in a range of 0.5 mm to 25 mm and an aspect ratio of the structuring is in a range of 0.0004 to 0.4.
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