Invention Grant
US08974603B2 Method of purifying filter, and method of cleaning or drying object to be treated 有权
过滤器的净化方法,清洗或干燥待处理物体的方法

Method of purifying filter, and method of cleaning or drying object to be treated
Abstract:
A filter that filters carbon dioxide in the gaseous, liquid or supercritical state is efficiently purified. The carbon dioxide is used to at least clean or dry an object to be treated, or to clean or dry the object to be treated. A method of purifying a filter for filtering carbon dioxide in a gaseous, liquid or supercritical state is provided. The carbon dioxide is used to at least clean or dry the object to be treated, or to clean and dry the object to be treated. According to the method, the filter 13 is purified before the carbon dioxide is filtered in the gaseous, liquid or supercritical state by the filter 13. The filter 13 is purified by allowing carbon dioxide to pass through the filter.
Information query
Patent Agency Ranking
0/0