Invention Grant
US08974631B2 Device for fluid treating plate-like articles 有权
用于流体处理板状制品的装置

  • Patent Title: Device for fluid treating plate-like articles
  • Patent Title (中): 用于流体处理板状制品的装置
  • Application No.: US12281795
    Application Date: 2007-02-07
  • Publication No.: US08974631B2
    Publication Date: 2015-03-10
  • Inventor: Rainer Obweger
  • Applicant: Rainer Obweger
  • Applicant Address: AT Villach
  • Assignee: Lam Research AG
  • Current Assignee: Lam Research AG
  • Current Assignee Address: AT Villach
  • Agency: Young & Thompson
  • Priority: ATA386/2006 20060308
  • International Application: PCT/EP2007/051152 WO 20070207
  • International Announcement: WO2007/101764 WO 20070913
  • Main IPC: B23Q1/64
  • IPC: B23Q1/64 H01L21/687 H01L21/67
Device for fluid treating plate-like articles
Abstract:
A device for fluid treatment of a plate-like article includes a rotary head for holding and rotating a plate-like article around a substantially vertical rotation axis drive elements to suspend and drive the rotary head without contact, the elements to suspend and drive the rotary head being arranged radially around the rotary head a substantially cylindrical sidewall, which is substantially concentric to the rotation axis, wherein the cylindrical sidewall is arranged between the rotary head and the drive elements and is introduced in the gap between the rotary head and the drive elements elevating members for lifting and lowering the rotary head and the wall relative to each other.
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