Invention Grant
- Patent Title: Planar or tubular sputtering target and method for the production thereof
- Patent Title (中): 平面或管状溅射靶及其制造方法
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Application No.: US13845594Application Date: 2013-03-18
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Publication No.: US08974707B2Publication Date: 2015-03-10
- Inventor: Martin Schlott , Sabine Schneider-Betz , Uwe Konietzka , Markus Schultheis , Ben Kahle , Lars Ebel
- Applicant: Heraeus Materials Technology GmbH & Co. KG
- Applicant Address: DE Hanau
- Assignee: Heraeus Deutschland GmbH & Co. KG
- Current Assignee: Heraeus Deutschland GmbH & Co. KG
- Current Assignee Address: DE Hanau
- Agency: Panitch Schwarze Belisario & Nadel LLP
- Priority: DE102012006718 20120404
- Main IPC: F21V9/00
- IPC: F21V9/00 ; C23C14/34 ; C22C5/06 ; H01J37/34

Abstract:
Planar or tubular sputtering targets made of a silver base alloy and at least one further alloy component selected from indium, tin, antimony, and bismuth accounting jointly for a weight fraction of 0.01 to 5.0% by weight are known. However, moving on to ever larger targets, spark discharges are evident and often lead to losses especially in the production of large and high-resolution displays having comparatively small pixels. For producing a sputtering target with a large surface area on the basis of a silver alloy of this type, which has a surface area of more than 0.3 m2 as a planar sputtering target and has a length of at least 1.0 m as a tubular sputtering target, and in which the danger of spark discharges is reduced and thus a sputtering process with comparatively high power density is made feasible, the invention proposes that the silver base alloy has a crystalline structure with a mean grain size of less than 120 μm, an oxygen content of less than 50 wt.-ppm, a content of the impurity elements, aluminum, lithium, sodium, calcium, magnesium, barium, and chromium, each of less than 0.5 wt.-ppm, and a metallic purity of at least 99.99% by weight.
Public/Granted literature
- US20130264200A1 PLANAR OR TUBULAR SPUTTERING TARGET AND METHOD FOR THE PRODUCTION THEREOF Public/Granted day:2013-10-10
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