Invention Grant
- Patent Title: Polycrystalline aluminum nitride material and method of production thereof
- Patent Title (中): 多晶氮化铝材料及其制造方法
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Application No.: US13185544Application Date: 2011-07-19
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Publication No.: US08974726B2Publication Date: 2015-03-10
- Inventor: Baxter Moody , Rafael Dalmau , David Henshall , Raoul Schlesser
- Applicant: Baxter Moody , Rafael Dalmau , David Henshall , Raoul Schlesser
- Applicant Address: US NC Morrisville
- Assignee: Hexatech, Inc.
- Current Assignee: Hexatech, Inc.
- Current Assignee Address: US NC Morrisville
- Agency: Womble Carlyle Sandridge & Rice, LLP
- Main IPC: C04B35/581
- IPC: C04B35/581

Abstract:
Methods of preparing polycrystalline aluminum nitride materials that have high density, high purity, and favorable surface morphology are disclosed. The methods generally comprises pressing aluminum nitride powders to form a slug, sintering the slug to form a sintered, polycrystalline aluminum nitride boule, and optionally shaping the boule and/or polishing at least a portion of the boule to provide a finished substrate. The sintered, polycrystalline aluminum nitride materials beneficially are prepared without the use of any sintering aid or binder, and the formed materials exhibit excellent density, AlN purity, and surface morphology.
Public/Granted literature
- US20120021175A1 POLYCRYSTALLINE ALUMINUM NITRIDE MATERIAL AND METHOD OF PRODUCTION THEREOF Public/Granted day:2012-01-26
Information query
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