Invention Grant
- Patent Title: Method of fabricating a magnetic tunnel junction device
- Patent Title (中): 制造磁性隧道结装置的方法
-
Application No.: US14481614Application Date: 2014-09-09
-
Publication No.: US08975091B2Publication Date: 2015-03-10
- Inventor: Min-Hwa Chi , Mieno Fumitake
- Applicant: Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN
- Assignee: Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN
- Agency: Innovation Counsel LLP
- Priority: CN201110317543 20111019
- Main IPC: H01L29/82
- IPC: H01L29/82 ; H01L43/12

Abstract:
The present disclosure relates to a magnetic tunnel junction (MTJ) device and its fabricating method. Through forming MTJ through a damascene process, device damage due to the etching process and may be avoided. In some embodiments, a spacer is formed between a first portion and a second portion of the MTJ to prevent the tunnel insulating layer of the MTJ from being damaged in subsequent processes, greatly increasing product yield thereby. In other embodiments, signal quality may be improved and magnetic flux leakage may be reduced through the improved cup-shaped MTJ structure of this invention.
Public/Granted literature
- US20140377884A1 METHOD OF FABRICATING A MAGNETIC TUNNEL JUNCTION DEVICE Public/Granted day:2014-12-25
Information query
IPC分类: