Invention Grant
- Patent Title: Method and system for controlling chip warpage during bonding
- Patent Title (中): 键合期间控制芯片翘曲的方法和系统
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Application No.: US13685404Application Date: 2012-11-26
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Publication No.: US08975092B2Publication Date: 2015-03-10
- Inventor: Chihiro Uchibori , Michael G. Lee
- Applicant: Fujitsu Limited
- Applicant Address: JP Kawasaki-shi
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki-shi
- Agency: Baker Botts L.L.P.
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L23/48 ; H01L23/00

Abstract:
A semiconductor assembly includes a first substrate and a chip. The chip is coupled to and spaced apart from the substrate. Further, the chip has a first surface facing the substrate. The chip also has a warpage profile indicating stress imparted on the chip following a reflow operation. The assembly includes a back layer disposed on the chip on a second surface substantially opposite from the first surface. The back layer has a non-uniform thickness. Additionally, the thickness of the back layer on each of a plurality of elements of the chip is based on the warpage profile.
Public/Granted literature
- US20140145324A1 METHOD AND SYSTEM FOR CONTROLLING CHIP WARPAGE DURING BONDING Public/Granted day:2014-05-29
Information query
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